Scanning Electron Microscope (Vega Tescan) with EDX-detector enables the mapping of chemical deposition of a SEM image.

Selected EDX-Features

Energy dispersive X-Ray micro analysis of a PbSn solder bump with under bump metallization. The colours show different chemical compositions according to selected X-ray wavelengths.

Chemical composition image of a SnAgCu solder. Different phases can be easily distinguished.

Spectrum analysis of selected rectangle areas, lines or points. Example: Parallel spectrum analysis of different areas of a Cu-sample

Element distribution of selected elements