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The
Scanning Probe Microscope M5 is equipped with an active
vibration cancellation system and acoustic enclosure.
Measurements are carried out in ambient conditions.
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scan modes: |
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links above lead to related web sites. Please
note that we are not responsible for the
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Scanner
specifications:
The scanning
head is equipped with optical closed loop linearization
(ScanMaster)
Maximum scan size : 100 µm
Sample
holders
Vacuum
chuck for 4/6 or 8 inch wafers
PI positioning system C-842 for in-situ loading measurements
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