| 
The
tensile rig is designed for in-situ SEM/AFM material
characterization and thermo-mechanical reliability testing
of MEMS and NEMS. The loading stage can be used for
tension/compression and fracture mechanical compact
tension (CT) specimens.
|
Performance data: |
|
Static loading capacity |
F
max |
= |
+/- 5KN |
|
Loading speed |
v
max |
= |
20 µm/sec |
|
Possible specimen geometries: |
|
CT-specimen |
W max
|
= |
20 mm |
|
Tension/compression specimen |
l max
|
= |
50mm |
| 
