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nanoDAC
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A unique method for deformation
measurement
on a nano-scale |
| nanoDAC is a new approach
for displacement and in-plane strain field measurement
utilizing AFM micro- and nanographs. In-situ AFM scans are carried
out at different thermo-mechanical load states of the
analysed object. Locally applied correlation algorithms
are used to track image patterns and to obtain incremental
displacement values. Applications of nanoDAC are thermo-mechanical
reliability studies of MEMS and NEMS and the mechanical
qualification of newly developed nano materials for
electronic packaging. |
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