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Prof. Dr. rer. nat. habil. Bernd Michel (Director of Micro Materials Center Berlin)

studied physics, Ph.D. in Solid State Physics at Martin-Luther-University Halle-Wittenberg in 1976. Professor for Solid Mechanics at the Institute of Mechanics of Academy of Sciences Berlin and Chemnitz from 1982. 1993 till now Head of Department Mechanics Reliability and Micro Materials of Fraunhofer Institute IZM, Berlin and Head of Dept. Simulation and Design of Microsystems at the Technical University Berlin. Since 2000 Director of Micro Materials Center Berlin. He deals with micro- and nanoreliability concepts, fracture mechanics for microcomponents. General Chair of International Micro Materials Conferences.

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Dr. rer. nat. Dietmar Vogel (Head of NanoMechanics Lab)
studied physics and received Ph.D. in plasma physics from St. Petersburg State University in 1980. 1981-1991 with the Institute of Mechanics, Chemnitz. 1993 he joined Fraunhofer IZM, Berlin, Dept. of Mechanical Reliability and Micro Materials. Main experience in experimental micro mechanics and related measurement techniques of electronic packaging. He deals with new approaches for deformation measurement techniques (microDAC) on micro and nano structures. Head of the Fraunhofer Nanomechanics Lab Berlin Adlershof within the MMCB. Member of IEEE.

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Astrid Gollhardt
education of physics technical engineer in Stuttgart in 1989. From 1989 to 1993, staff member at the Department von Klitzing, Max Planck Institute of Solid State Research, Stuttgart. Since 1997 with Fraunhofer IZM, Berlin, at the Department of Mechanical Reliability and Micro Materials. Main field of activity on scanning electron microscopy (SEM), in-situ mechanical- and heating measurement in SEM and AFM, and microDAC deformation measurements in packaging.

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Dipl.-Ing. Jürgen Keller
finished his study of Mechanical Engineering at the University of Kaiserslautern in 1999. Since then he is pursuing the Ph.D degree in a collaboration of the Lehstuhl Polymermaterialien at the Brandenburgische Universität Cottbus and the Fraunhofer Institute for Reliability and Micro Integration, Berlin.

Research topics:

Development and application of the nanoDAC technique for Crack evaluation of thermoset polymers.
Thermomechanical reliability assessment of MEMS and NEMS.
Microstructral analysis with SPM methods.

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